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Katalog proizvoda

XGTP, Parallel Seal Slit Valve for High Vacuum

  • Window sized for 300mm wafers
  • End lock holds gate opened or closed during emergency stop
  • Insert or cassette type (standard, half MESK) valves
  • FKM or Kalrez® 4079 gate seal materials
  • Optional position sensor and connectors
  • Various made to order options available

Configure your product

XGTP31-50336-
Valve Type
Gate O-ring Material
Auto Switch & Connector
End Lock