<UL><LI>Direct operated precision regulator <LI>Sensitivity: within 0.2%F.S. <LI>3 types of set pressure allow more freedom in designing a circuit <LI>Repeatability: within <SPAN style="FONT-SIZE: 10pt">±1%F.S.</SPAN> <LI><SPAN style="FONT-SIZE: 10pt">Backflow function available</SPAN><LI><SPAN style="FONT-SIZE: 10pt">Available special applications: (10-ARP) clean room compliant; (20-ARP) copper-free, fluorine-free; (21-ARP) clean room compliant, copper-free. fluorine-free, silicon-free</SPAN></LI></UL>