High Vacuum Solutions

Ensure your system runs at its peak

Does your manufacturing process comprise any of the following?

• Etching equipment
• Sputtering equipment
• Ion implantation equipment
• CVD equipment

If it does, our high-quality peripheral equipment is precisely what you need to exhaust air from and supply atmospheric pressure to your vacuum chamber when processing wafers and LCDs.

SMC’s high vacuum solutions provide high performance while fulfilling the required conditions such as non-leakage, clean specifications, corrosion resistance, long service life and minimum maintenance time.

Our committed and expertly trained professionals are at your disposal to take care of your field solutions service and product needs in addition to SMC’s global coverage and manufacturing.