Product catalogue
SMC offers a variety of digital flow switches. Series PF2A for air, PF2W for water, PF2D for deionized water and chemicals. Flow rate setting and monitoring are possible with the digital display. Integrated and remote type displays are available for different types of application. Water resistant construction is used conforming to IP65 protection. Switching from real-time flow rate to accumulated flow is possible.
The SRF30 series is designed to regulate DI water and N2 gas in the clean room. Fluoro resin material is used in the fluid contact area. The fluid contact area is washed with freon ultra sonic and DI water.
Semiconductor and LCD manufacturers now have a perfect pump solution with the launch of the new PAF diaphragm pump from SMC. Designed specifically to meet industry demands, this high performance fluororesin pump is constructed with non metallic body parts to ensure perfect compatibility when using high purity chemicals.With all wetted parts made from either new PFA or PTFE, the PAF´s premium chemical and temperature characteristics are further enhanced with use of PFA-PPS dual construction to improve both proof pressure and heat cycle performance.Currently available in two options, an automatically operated type with a solenoid valve built into the pump body or an air operated type where the valve and electrical circuit are separated from the pump, the PAF offers a lightweight, compact, high flow rate solution to meet the most demanding of needs. Additional features include the option to include an optical leak detector which can provide an early warning signal of diaphragm failure and in the case of the air operated type, the addition of mounted optical stroke sensors to ensure stable operation of the pump and accurate cycle monitoring.