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Product catalogue

XL

XL
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

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XLJ, Vacuum Angle Valve with Release Valve

XLJ, Vacuum Angle Valve with Release Valve

  • Single acting. O-ring seal.
  • With solenoid valve and built-in release valve structure.
  • Prevents the reverse flow of oil through the roughing pump.
  • Aluminium bodied.
  • Minimal outgassing.
  • High corrosion resistance to fluorine gas.
  • Minimal contamination from heavy metals.

XL*, High Vacuum Angle Valve, Air Operated

XL*, High Vacuum Angle Valve, Air Operated

  • This product is being discontinued and will be replaced by (XLA/XLC/XLF/XLG)-2 series.
  • Light weight and compact
  • Uniform baking temperature
  • High fluorine resistance
  • Low outgassing
  • Little heavy metal contamination

XL*V, High Vacuum Angle Valves, Air Operated w/Solenoid Valve

XL*V, High Vacuum Angle Valves, Air Operated w/Solenoid Valve

  • This product is being discontinued and will be replaced by (XLAV/XLFV)-2 series.
  • Light weight and compact
  • Uniform baking temperature
  • High fluorine resistance
  • Low outgassing
  • Little heavy metal contamination

XLH, High Vacuum Manual Angle Valve, Bellows Seal

XLH, High Vacuum Manual Angle Valve, Bellows Seal

  • High vacuum angle valve
  • Type: manual, bellows seal
  • Flange size: 16 ~ 50
  • Heater type: H1 (80°C), H2 (100°C), H3 (120°C)
  • Auto switches not available

XLS, High Vacuum Angle Valve, Electromagnetic Type, Bellows Balance

XLS, High Vacuum Angle Valve, Electromagnetic Type, Bellows Balance

  • Particulates are reduced because there are no sliding metal parts
  • Pressure balance mechanism allows unrestricted exhaust direction
  • Can be used in portable equipment since air for drive is not required
  • A control power supply circuit for solenoid valve drive has been made standard

XLAQ, Aluminum One-touch Connection and Release High Vacuum Angle Valve, Normally Closed, Bellows Seal

XLAQ, Aluminum One-touch Connection and Release High Vacuum Angle Valve, Normally Closed, Bellows Seal

  • One-touch connection and release mechanism for the bonnet assembly.
  • Compact and lightweight.
  • Large conductance and small body.
  • Know-how required to prevent careless (dis)assembly.

XLDQ, Aluminum One-touch Connection and Release High Vacuum Angle, 2-step Control, Single Acting/Bellows Seal, O-ring Seal

XLDQ, Aluminum One-touch Connection and Release High Vacuum Angle, 2-step Control, Single Acting/Bellows Seal, O-ring Seal

  • One-touch connection and release mechanism for the bonnet assembly.
  • Compact and lightweight.
  • Large conductance and small body.
  • Know-how required to prevent careless (dis)assembly.

XLA-2, Aluminium High Vacuum Angle Valve, Normally Closed/Bellows Seal

XLA-2, Aluminium High Vacuum Angle Valve, Normally Closed/Bellows Seal

  • Single acting, Bellows seal.
  • Aluminium bodied.
  • Uniform baking temperature.
  • Minimal outgassing.
  • High corrosion resistance to fluorine gas.
  • Lightweight, Compact.
  • Minimal contamination from heavy metals.

XLC-2, Aluminum High Vacuum Angle Valve, Double Acting, Bellows Seal

XLC-2, Aluminum High Vacuum Angle Valve, Double Acting, Bellows Seal

  • Double acting, Bellows seal.
  • Aluminium bodied.
  • Uniform baking temperature.
  • Minimal outgassing.
  • High corrosion resistance to fluorine gas.
  • Lightweight, Compact.
  • Minimal contamination from heavy metals.

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